Overview
About GIXA
Publications
Tools
Funding
Contact
Tools Index
Penetration depth
Refractive index
Atomic scattering factors
GIXA 1 layer
GIXA bi-layer
plot GIXA simulation for a single layer
Incident Energy:
[eV]
Beam Height:
[µm]
XRF Detector Width:
[mm]
Angle:
-
[deg]
LayerFormula:
(e.g.: Si1,Si1O2 or Hf1O2)
LayerThickness:
[nm]
LayerDensity:
[g/cm
3
]
LayerRoughness:
[nm]
SubstrateFormula:
(e.g.: Si1,Si1O2 or Hf1O2)
SubstrateDensity:
[g/cm
3
]
SubstrateRoughness:
[nm]
Xray-Line:
(e.g.: Si-KL3 or Hf-L3M5)
Execute