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Penetration depth
Refractive index
Atomic scattering factors
GIXA 1 layer
GIXA bi-layer
plot GIXA simulation for a bi-layer
Incident Energy:
[eV]
Beam Height:
[µm]
XRF Detector Width:
[mm]
Angle:
-
[deg]
Layer1Formula:
(e.g.: Si1,Si1O2 or Hf1O2)
Layer1Thickness:
[nm]
Layer1Density:
[g/cm
3
]
Layer1Roughness:
[nm]
Layer2Formula:
(e.g.: Si1,Si1O2 or Hf1O2)
Layer2Thickness:
[nm]
Layer2Density:
[g/cm
3
]
Layer2Roughness:
[nm]
SubstrateFormula:
(e.g.: Si1,Si1O2 or Hf1O2)
SubstrateDensity:
[g/cm
3
]
SubstrateRoughness:
[nm]
Xray-Line:
(e.g.: Si-KL3 or Hf-L3M5)
Execute